SE-5AT Semiconductor Series | Optical Testing Equipment
Intelligent automatic optical 3D white light interferometry/concentric focus measurement
White light interferometer is a non-contact 3D microscopic surface measurement device that uses interference and confocal technology to achieve nano-level measurement.
3D measurement technology
3D white light interferometry/concentric focus measurement advantages and features
01.
It can also meet the requirements of high-speed and micron-level height difference measurement.
02.
Can be used with point cloud AI deep learning system to interpret point cloud information
03.
Can be used with white light interference microscopy system for re-examination and spot checking of nanometer-level measurements
04.
Can measure absorbent or colored materials, diffusive and reflective materials
05.
Both rough and polished material surfaces can be measured
Applicable to
Wafer type (silicon wafer, sapphire, SIC, GAN, etc.) semiconductor wafer surface profile inspection, component type (LED, LED, Micro lens, MEMS, etc.) microstructure surface shape parameter measurement.
PCB (ABF, precision welding, solder balls) microstructure surface shape parameter measurement.
Measurement Items
2D/3D surface profile, step difference, curvature and other micro-structure surface parameter measurements.
Standard model
Automatic optical testing equipment specifications
Intelligent automatic optical 3D white light interferometry equipment
線共軛焦3D量測設備 | 規格 |
|---|---|
測量速度 | 高達 36,000 行/秒 |
測頭Z軸量測精度 | 0.5 - 8 µm，具體取決於使用的探頭 |
Z軸測量範圍 | 680 µm 至 10,600 µm，具體取決於使用的探頭 |
掃描方式 | 垂直式線掃移動掃描 |
瑕疵量測項目 | 高度段差量測、翹曲度量測 |
3D white light interference
Measurement Applications
Wafer warp measurement
Panel cutting groove measurement
PCB solder bump inspection
Panel height measurement
Battery level measurement
Linker status check
Wafer microstructure inspection
Substrate microstructure inspection
Note: The picture is a 3D image measured with a German PRECITEC probe and is for reference only.