White light interferometer is a non-contact 3D microscopic surface measurement device that uses interference and confocal technology to achieve nanoscale measurement.

White light interferometer is a non-contact 3D microscopic surface measurement device that uses interference and confocal technology to achieve nanoscale measurement.

Multifunctional wafer measuring instrument, using upper and lower high-precision white light concentric focus sensors to measure wafer thickness, curvature, etc.

Auto-focus microscope module captures wafer/chip surface images to detect surface defects and height variations