AL-5AT Semiconductor Series
Wafer defect measurement system
Intelligent automatic optical 3D white light interferometry/concentric focus measurement
White light interferometer is a non-contact 3D microscopic surface measurement device that uses interference and confocal technology to achieve nanoscale measurement.
Intelligent automatic optical 3D white light interferometry/concentric focus measurement
White light interferometer is a non-contact 3D microscopic surface measurement device that uses interference and confocal technology to achieve nanoscale measurement.
Intelligent automatic wafer thickness dual-axis measurement equipment
Multifunctional wafer measuring instrument, using upper and lower high-precision white light concentric focus sensors to measure wafer thickness, curvature, etc.
Auto-focus microscope module captures wafer/chip surface images to detect surface defects and height variations