SE-5AT Semiconductor Series | Optical Testing Equipment
Intelligent automatic optical 3D white light interferometry/concentric focus measurement
White light interferometer is a non-contact 3D microscopic surface measurement device that uses interference and confocal technology to achieve nano-level measurement.
White light interferometry
Line Laser Projection
AI multi-focus superposition
3D measurement technology
3D white light interferometry/concentric focus measurement advantages and features
Multifunctional measurement function
It can also meet the needs of microscopic inspection and three-dimensional measurement of the surface of objects, and can perform more multifunctional inspections at the nano level, such as roughness measurement, film thickness measurement, 3D profile analysis, and microstructure analysis.
Exclusive algorithm
Through special algorithms, faster and more accurate detection results are achieved. The performance, function, efficiency and design are superior to the existing 3D profilers on the market. Positioning marks can be set, measurement targets can be set, and reports can be automatically produced.
Optical technology
Multi-band LED light sources have better versatility, while laser confocal has a more fixed wavelength. The LED illumination area is more evenly illuminated, and the speed is faster than laser scanning, which can avoid interference patterns and scattering problems.
Measurement Applications
It is suitable for wafer accumulation (silicon wafer, sapphire, SIC, GAN, etc.) semiconductor wafer surface profile inspection, component type LCD, LED, Micro lens, MEMS and other micro-structure surface shape parameter measurement.
Standard model
Automatic optical testing equipment specifications
Intelligent automatic optical 3D white light interferometry equipment
Height measurement
Roughness measurement
Thin film measurement
型號 | 白光干涉3D量測設備 |
|---|---|
膜後量測 | 2um以上
50nm~2um(選購膜厚儀) |
粗糙度量測 | 1nm |
量測精度（Z方向） | 0.5% (exp. 50x 於10um標準件可達50nm) |
電動鼻輪 | 最多可搭載6顆鏡頭（5X-150X） |
* Customized long-travel platform, designed to be compatible with 40 types of objective lenses
Image Detection
Measurement interface
BUENOOPTICS's customized UI is similar to the original public program interface, which reduces the learning curve and makes it easy to get started.
▍White light interferometry 2D measurement
▍White light interferometry 3D measuring instrument
3D white light interference
Measurement Applications
FTrace
Hole
Laser Cut
Laser Groove
Aspheric
Bump
Laser Hole
Multiple SH
Pad
Piller
Dimple
Double SH
Dual Hole
Edge
Circle Pad
Cross Kerf
R Hole
Solder Mask
Spacer
Spheric
Trace
Trench
Wafer Pad
MICRO LED